发明名称 Verfahren zum Verpacken integrierter Sensoren
摘要 A sensor device having a sensing structure (2) integrated on a substrate (1) is packaged in a housing (10) by transfer molding. During molding and in order to protect the sensing structure (2), a deformable layer (35) of a mold section (30) abuts against a sacrificial buffer structure (6) protecting the sensing structure (2). The deformable layer (35) helps to keep an access window free, through which the buffer structure (6) can be removed once the housing (10) has hardened.
申请公布号 DE112006004083(T5) 申请公布日期 2009.11.26
申请号 DE20061104083T 申请日期 2006.10.18
申请人 SENSIRION HOLDING AG 发明人 HUNZIKER, WERNER
分类号 G01D11/24 主分类号 G01D11/24
代理机构 代理人
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