发明名称 METHOD OF MANUFACTURING JUNCTION STRUCTURE, AND METHOD OF MANUFACTURING LIGHT-EMITTING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a junction structure and a method of manufacturing a light-emitting device by which occurrence of voids in a junction interface of each substrate can be prevented and a junction structure of substrates with a good quality can be obtained. <P>SOLUTION: The junction structure 140 is manufactured by the steps of: forming a thin film on a junction surface of a first substrate 120 by an ambient pressure associated beforehand with a preset warp shape so that the first substrate 120 has the preset warp shape; and joining the first substrate 120 where the thin film is formed and a second substrate 110 by compression by means of adhesive materials 113 and 122. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009277944(A) 申请公布日期 2009.11.26
申请号 JP20080128766 申请日期 2008.05.15
申请人 TOYODA GOSEI CO LTD 发明人 MIZUTANI KOICHI;KAGA KOJI
分类号 H01L21/02;H01L33/32;H01S5/323 主分类号 H01L21/02
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