发明名称 |
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE TRAY, AND SUBSTRATE STORAGE DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To improve the manufacturing yield and reliability of a semiconductor device. SOLUTION: A rubber member is brought into contact with a wiring board outside an element mounting region, and an unpolymerized component of a rubber member is transferred to outside the element mounting region. Then a semiconductor element is mounted in the element mounting region, and a resin material for sealing is charged in the gap between the wiring board and semiconductor element. The resin material for sealing is cured to form a sealing resin made of an underfill material in the gap between the wiring substrate and semiconductor element. Consequently, the manufacturing yield and reliability of the semiconductor device are improved. COPYRIGHT: (C)2010,JPO&INPIT |
申请公布号 |
JP2009277838(A) |
申请公布日期 |
2009.11.26 |
申请号 |
JP20080126892 |
申请日期 |
2008.05.14 |
申请人 |
FUJITSU MICROELECTRONICS LTD |
发明人 |
OKADA AKIRA;UENO SEIJI |
分类号 |
H01L21/56;B65D85/86;H01L21/60;H01L23/28;H05K3/28 |
主分类号 |
H01L21/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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