DIELECTRIC FILM, DIELECTRIC ELEMENT, AND PROCESS FOR PRODUCING THE DIELECTRIC ELEMENT

摘要

Disclosed is a dielectric film formed by attaching a single layer or a multilayer of a niobic acid nano sheet.  Also disclosed is a dielectric element that can simultaneously realize a high permittivity and good insulating properties even in a nano region.  The dielectric element comprises a dielectric film and other electrode disposed on the surface of the dielectric film.  Further disclosed is a process for producing the dielectric element that can sweep away problems of a deterioration in a substrate interface by heat annealing in the production process, a deviation in composition from a contemplated composition caused by the deterioration in the substrate interface, and electrical mismatching, and an essential problem of a "size effect" that a reduction in the thickness of the film to a nano level lowers the specific permittivity and increases a leak current; can utilize unique properties and high texture and structure regulating properties possessed by the niobic acid nano sheet; and can produce the element at a low temperature free from the influence of a deterioration in substrate interface and a deviation in composition from a contemplated composition.