MASTER DISK FOR MAGNETIC TRANSFER, ITS MANUFACTURING METHOD, AND MAGNETIC TRANSFER METHOD

摘要

PROBLEM TO BE SOLVED: To make it possible to manufacture a master disk for magnetic transfer which is small in the amount of warpage and distortion and excellent in flatness. SOLUTION: A manufacturing method is provided with; an electrocasting process which performs electrocasting on an original plate 17 in which information is formed with an uneven pattern P' and stacks a metal board 18 which consists of an Ni electrocasting layer of two layers 11A and 11B with different crystal orientation on original plate 17 and transfers the uneven pattern P' to the metal board 18; an exfoliation process which exfoliates the metal board 18 from the original plate 17 and uses it as a master substrate 11; and a magnetic layer deposition process of depositing a magnetic layer 12 on the uneven pattern P of the master substrate 11. COPYRIGHT: (C)2006,JPO&NCIPI