| 摘要 |
<p>PURPOSE: A mask for a fine hole pattern is provided to prevent the leakage of a light supplied from a neighboring micro hole pattern by turning a micro hole pattern of a polygon around a mask substrate. CONSTITUTION: A micro hole pattern mask(100) comprises a mask substrate, a light-shielding layer, and a light-shield pattern. The light-shielding layer(120) is formed on the top of the mask substrate(110), and the hole pattern(120a) of polygon is formed at the light-shielding layer. The hole pattern is designed to form a hole on a wafer and is an octagon of which an edge is removed as a linear shape and or a curve shape. The mask substrate in which the hole pattern is formed is exposed to the top. The light-shield pattern is formed on the top of the exposed mask substrate.</p> |
