| 摘要 |
A polishing liquid for metals which comprises: a metal oxide solubilizer, a metal corrosion inhibitor, a polyacrylic acid polymer, a metal-oxidizing agent, and water. The metal-oxidizing agent is hydrogen peroxide, and the content of hydrogen peroxide is 12-30 mass% based on the polishing liquid for metals. With the polishing liquid for metals, a surface can be polished so as to realize excellent flatness while maintaining a satisfactory polishing speed. Also provided is a method of polishing a film to be polished which comprises using the polishing liquid.
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