发明名称 CMOS image sensor and fabricating method thereof
摘要 A CMOS image sensor and method of fabricating the same are disclosed. The method comprises forming a plurality of polysilicon patterns on a silicon epitaxial layer which correspond to a plurality of photodiodes in a dummy pixel area, depositing a metal with a high melting point metal on the plurality of polysilicon patterns using a photoresist in an etching process, forming a silicide layer of the high melting point metal by removing the photoresist and then performing an ashing and rapid annealing process, sequentially forming a device protecting layer and a planarization layer on the silicon epitaxial layer and silicide layer, and forming a microlens on the planarization layer which corresponds to the silicide layer.
申请公布号 US7622320(B2) 申请公布日期 2009.11.24
申请号 US20070926028 申请日期 2007.10.28
申请人 DONGBU HITEK CO., LTD. 发明人 SONG JUN WOO
分类号 H01L21/00 主分类号 H01L21/00
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