发明名称 Wafer bonding hermetic encapsulation
摘要 A method for providing encapsulation of an electronic device which obtains an encapsulating member configured to enclose the electronic device, prepares a surface of the encapsulating member for non-adhesive direct bonding, prepares a surface of a device carrier including the electronic device for non-adhesive direct bonding, and bonds the prepared surface of the encapsulating member to the prepared surface of the device carrier to form an encapsulation of the electronic device. As such, an encapsulated electronic device results which includes the device carrier having a first bonding region encompassing the electronic device, includes the encapsulating member having at least one relief preventing contact between the electronic device and the encapsulating member and having a second bonding region bonded to the first bonding region of the device carrier, and includes a non-adhesive direct bond formed between the first and second bonding regions thereby to form an encapsulation of the electronic device. The encapsulated electronic device can be an electronic or optoelectronic device.
申请公布号 US7622324(B2) 申请公布日期 2009.11.24
申请号 US20040913357 申请日期 2004.08.09
申请人 ZIPTRONIX 发明人 ENQUIST PAUL M.;TONG QIN-YI;FOUNTAIN, JR. GAIUS GILLMAN;MARKUNAS ROBERT
分类号 H01L21/00;B81B7/00;H01L21/50;H01L23/10 主分类号 H01L21/00
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