发明名称 Method for manufacturing semiconductor device
摘要 According to the present invention, there is provided a method for manufacturing a semiconductor device that includes preparing a first semiconductor substrate and a second semiconductor substrate, forming a first insulating film on a surface of the first semiconductor substrate, forming circuit elements on a first surface of the second semiconductor substrate, grinding a second surface of the second semiconductor substrate, forming a second insulating film on the second surface of the second semiconductor substrate, and bonding the first insulating film and the second insulating film.
申请公布号 US7622362(B2) 申请公布日期 2009.11.24
申请号 US20070937735 申请日期 2007.11.09
申请人 NEC ELECTRONICS CORPORATION 发明人 KATOU HIROAKI
分类号 H01L21/30 主分类号 H01L21/30
代理机构 代理人
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