发明名称 Device including piezoelectric thin film and a support having a vertical cross-section with a curvature
摘要 An acoustic resonator includes a substrate, a support section provided on the substrate, a lower electrode provided on the support section, a piezoelectric body provided on the lower electrode, and an upper electrode provided on the piezoelectric body. The lower electrode, the piezoelectric body and the upper electrode form a vibration section. The support section for supporting the vibration section is shaped such that at least one portion of a vertical cross-section thereof has a curvature.
申请公布号 US7623007(B2) 申请公布日期 2009.11.24
申请号 US20060580139 申请日期 2006.10.13
申请人 PANASONIC CORPORATION 发明人 NAKATSUKA HIROSHI;ONISHI KEIJI;YAMAKAWA TAKEHIKO;IWASAKI TOMOHIRO;KAMIYAMA TOMOHIDE
分类号 H03H9/05;H01H57/00;H02N2/00;H03H9/54;H03H9/70 主分类号 H03H9/05
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