| 摘要 |
PURPOSE: A telescopic type robot rotation body loading structure is provided to improve accuracy in a semiconductor manufacturing process by moving a center of mass of the robot rotation body to a low portion. CONSTITUTION: A first base(10) has a first shape and has a predetermined length. A second base has a second shape which is symmetrical to that of the first base. A third base(30) is implemented between the first and second bases. Two linear moving guides(40-1,40-2), coupled with each other, are implemented on the first and second bases in the length direction. Another two linear moving guides(40-3,40-4), coupled with the second base, are implemented on the third base in the length direction. Two belt actuators(50-1,50-2) are implemented inside the second base. A first belt connector(12) is exposed to an inner portion of the first base and is coupled with an upper portion of the belt actuators. A second belt connector(32) is exposed to a lower portion of the third base and is coupled with a lower portion of the belt actuators. A ball screw(60) penetrates the second base to elevate the second base as it rotates. When the second base is elevated, the belt actuators are rotated to apply a stroke greater than that of the second base on the third base.
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