| 摘要 |
A susceptor deformation preventing apparatus for stably supporting base of the susceptor is provided to prevent deformation of the susceptor, especially, deflection of peripheral side of the susceptor by adopting structural assembly of ceramic panels, ceramic support flange, fixture blocks and flanges for the panels, and supports for the blocks and flanges on the base of the susceptor. The susceptor includes: a plurality of ceramic supporting panels(110) which are radially arranged at a base of the susceptor(S); a ceramic supporting flange(120) which is located at bottom of the panels(110) to receive the ceramic panels; a fixture block(140) which is arranged on the ceramic panels to fix the panels as fitted into the ceramic supporting flange(120); a fixture flange(130) which is coupled with the fixture block(140); and a supporter(150) which supports the fixture block(140) and the fixture flange(130). The susceptor further has a chemical-vapor deposition device including: a chamber body; a shower head; and a chamber lead with inlet part for feeding reactive gas to the shower head.
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