| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain an acceleration detection unit which has a simplified structure, is suitable for miniaturization and reduction in height, and suppresses cross axis sensitivity. <P>SOLUTION: The acceleration detection unit includes a structure provided with a fixed member, a movable member, two long beams whose respective both ends are supported with the fixed member and the movable member respectively, and a short beam whose both ends are fixed by each long beam and which extends in directions approximately perpendicular to each long beam, and provided with narrow parts formed respectively in two opposite planes which are ends of the two long beams and are near to the fixed member; and a stress sensitive element having stress sensitive sections and fixed ends fixed respectively to both ends of the stress sensitive sections; and onto each one surface of the fixed member and the movable member, the two fixed ends of the stress sensitive element are joined respectively. The two long beams are so constituted as to bend in a direction of an acceleration detection axis by applied acceleration, making the narow parts function as the fulcrums. <P>COPYRIGHT: (C)2010,JPO&INPIT |
