摘要 |
<P>PROBLEM TO BE SOLVED: To provide a droplet ejection head that can surely carry out highly accurate mounting of an OLB part and can securely fix a driving circuit onto a silicone substrate, further a method of manufacturing the droplet ejection head that can enhance workability and productivity, and a highly reliable droplet ejection device. Ž<P>SOLUTION: The droplet ejection head includes a passage forming substrate 22, a plurality of piezoelectric elements 23, a reservoir forming substrate 25 disposed on the passage forming substrate 22 on the side of the plurality of piezoelectric elements 23, a plurality of drivers IC 26 disposed on the reservoir forming substrate 25, and a flexible substrate 27 that connects the driver IC 26 and a terminal 73 of the piezoelectric element 23 exposed to an opening 60 of the reservoir forming substrate 25, characterized in that the flexible substrate 27 and the driver IC 26, and the driver IC 26 and the reservoir forming substrate 25, respectively, are fixed together via an adhesive 65, and the adhesive 65 is disposed on a lateral face 26d that connects an active face 26b of the driver IC 26 and a back face 26c disposed opposite to the active face 26b. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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