发明名称 FLASH MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <p>PURPOSE: A flash memory device and a method of manufacturing the same are provided to allow a charge storage metal layer to be arranged on a side of it on which is contacted with a gate electrode. CONSTITUTION: A flash memory device includes a substrate, a gate pattern, a charge storage gate, a charge storage metal, a dielectric layer between gates. A substrate includes an active area defined by an element isolation film, and the gate pattern is expanded to be crossed with the active area. The charge storage gate is arranged at a cross point of the gate pattern and the active area and includes a top surface, a side surface, and a bottom surface. The charge storage metal layer is interposed between the side and gate pattern of the charge storage gate.</p>
申请公布号 KR20090119310(A) 申请公布日期 2009.11.19
申请号 KR20080045271 申请日期 2008.05.16
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, JAE DUK;LEE, CHOONG HO
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
代理机构 代理人
主权项
地址