发明名称 PATTERN TRANSFER APPARATUS AND PATTERN TRANSFER METHOD
摘要 A pattern transfer apparatus includes a storage-medium-surface detecting unit that detects a foreign substance or defect on a surface of a storage medium and specifies a position and a size of the foreign substance or defect; a relative-position adjusting unit that adjusts a relative position on a contact surface between the surface of the storage medium and a transfer pattern surface of a transfer master, and a relative-position-adjustment instructing unit that calculates an adjusted value of the relative position according to a detection result, and instructs the relative-position adjusting unit to adjust the relative position based on the adjusted value.
申请公布号 US2009285073(A1) 申请公布日期 2009.11.19
申请号 US20090398595 申请日期 2009.03.05
申请人 FUJITSU LIMITED 发明人 TAKAISHI KAZUHIKO;FUKUSHI MASANORI
分类号 G11B27/36 主分类号 G11B27/36
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