| 摘要 |
A mirror device and a method for manufacturing the mirror device are presented. The mirror device includes a mirror formed from a first substrate and a hinge/support structure formed from a second substrate. The hinge/support structure includes a recessed region and a torsional hinge region. The mirror is coupled to the hinge/support structure at the recessed region. Further, a driver system is employed to cause the mirror to pivot about the torsional hinge region.
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