| 摘要 |
A method for controlling the position of a microscope lens comprising receiving a reference signal corresponding to a reference position of the microscope lens; receiving a measurement signal corresponding to an actual position of the microscope lens; receiving a deviation signal characteristic of a predetermined positional deviation from the reference position; and using the measurement signal, the deviation signal and the reference signal to generate a positional control signal for use in setting the position of the microscope lens.
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