Method for time-resolved detection of photons for analyzing processes of semiconductor structures, involves continuously or discontinuously changing acceleration of electrons in z-direction between beginnings of consecutive linear images

摘要

The method involves accelerating electrons released from a photomultiplier in x and y directions. Acceleration of the electrons in y-direction is changed as function of the time. The electrons are detected in spatially resolved manner by an imaging element (10) extending in the y direction and z direction. The x, y and z directions form an angle between 10 degree and 170 degree. Detection patterns are stored by the element during an imaging period. The acceleration of the electrons in the z-direction is continuously or discontinuously changed between beginnings of consecutive linear images. An independent claim is also included for a measuring arrangement for time-resolved analysis of electromagnetic fields, comprising a distance camera.