| 摘要 |
<p>A cup wheel for a grinding tool for use in grinding semiconductor substrates is presented herein, the wheel comprising: a hub having a pair of opposing faces and a peripheral rim linking said faces; and at least one grinding segment mounted on and upstanding from at least one face of the hub; wherein in use, as the wheel is rotated, the face ofthe hub on which the at least one grinding segment is mounted is directed towards the substrate to be ground, to bring the at least one grinding segment into contact withthe substrate, and wherein at least one pair of side faces of the at least one grinding segment intersect at a leading edge which substantially faces the direction of travel of the grinding segment as the wheel rotates.</p> |
