| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a means capable of reducing a frequency of trial reviews and improving the work efficiency in the work for searching the best observation condition in a review apparatus. <P>SOLUTION: For defect review performed by a review device 10, the recipe parameter management apparatus 3 stores, in a parameter setting history DB32 as a recipe parameter setting history: the set values of recipe parameters set on the defect review; the frequency of trial reviews performed until the recipe parameters are set; and the defect images obtained on the defect review. Meanwhile, the apparatus displays on a terminal device 40 a histogram generated based on the recipe parameter setting history stored in the recipe parameter setting history DB32 and the frequency of trial reviews. Thus, an operator can easily obtain the data relating to the past recipe parameter setting. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
