| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positioning table having good damping characteristics in a wide vibration frequency range while actualizing easy adjustment of the damping characteristics. Ž<P>SOLUTION: The positioning table 101 includes a drive mechanism 53, a table movable part 11 linearly movable with the drive mechanism 53, a damper mechanism 3 mounted on the table movable part 11, and vibration detecting parts 32A, 32B for detecting the vibration amount of the table movable part 11. The damper mechanism 3 includes piezoelectric elements 1A, 1B, and a weight 2 combined with the piezoelectric elements 1A, 1B. It also has a control part 33 for supplying driving voltage to the piezoelectric elements 1A, 1B in accordance with the vibration amount detected by the vibration detecting parts 32A, 32B. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
