发明名称 INORGANIC OXIDE FILM CONTAINING ARRAYED FINE METALLIC PARTICLES, AND PRODUCTION METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a method for producing an array film which is an inorganic oxide film having fine metallic particles arrayed therein in a layer form, with a simple technique. SOLUTION: The method for producing the inorganic oxide film containing the arrayed fine metallic particles comprises: a step (A) of forming a thin film containing an inorganic oxide sol-gel component and a metal component on a reflective substrate; and a step (B) of irradiating the thin film on the reflective substrate with a light having a particular wavelength. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009270144(A) 申请公布日期 2009.11.19
申请号 JP20080120190 申请日期 2008.05.02
申请人 UBE IND LTD 发明人 MATSUBAYASHI AKIHIRO;ATAKA KIKUO;FUKUNAGA KENJI;TSUJI TETSUO
分类号 C23C18/14;B82B1/00;B82B3/00 主分类号 C23C18/14
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