发明名称 |
INORGANIC OXIDE FILM CONTAINING ARRAYED FINE METALLIC PARTICLES, AND PRODUCTION METHOD THEREFOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing an array film which is an inorganic oxide film having fine metallic particles arrayed therein in a layer form, with a simple technique. SOLUTION: The method for producing the inorganic oxide film containing the arrayed fine metallic particles comprises: a step (A) of forming a thin film containing an inorganic oxide sol-gel component and a metal component on a reflective substrate; and a step (B) of irradiating the thin film on the reflective substrate with a light having a particular wavelength. COPYRIGHT: (C)2010,JPO&INPIT
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申请公布号 |
JP2009270144(A) |
申请公布日期 |
2009.11.19 |
申请号 |
JP20080120190 |
申请日期 |
2008.05.02 |
申请人 |
UBE IND LTD |
发明人 |
MATSUBAYASHI AKIHIRO;ATAKA KIKUO;FUKUNAGA KENJI;TSUJI TETSUO |
分类号 |
C23C18/14;B82B1/00;B82B3/00 |
主分类号 |
C23C18/14 |
代理机构 |
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