| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid droplet delivering head which ensures highly accurate mounting of an OLB part and fixation of a driving circuit part onto a silicon substrate, and to provide a method for manufacturing for a liquid droplet delivering head which can further enhance the workability and productivity, and to provide a liquid droplet delivering apparatus excellent in reliability. Ž<P>SOLUTION: The liquid droplet delivering head 1 includes a flow channel forming substrate 22, a plurality of piezoelectric elements 23 provided on the flow channel forming substrate 22, a reservoir forming substrate 25 formed on the plurality of piezoelectric elements 23 side of the flow channel forming substrate 22, a plurality of driver ICs 26 set on the reservoir forming substrate 25, and a flexible substrate 27 which connects terminal parts 73 of the piezoelectric elements 23 exposed to an opening part 60 of the reservoir forming substrate 25 and the driver ICs 26 with each other. A first adhesive material 83 which connects the terminal parts 73 and connecting parts 27b to the terminal parts 73 of the flexible substrate 27 with each other, and a second adhesive material 80 which fixes the reservoir forming substrate 25 and the driver ICs 26 to each other are composed of materials that include the same component. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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