| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micro lens, which is a micro polished article, formed by efficiently applying a polishing load thereto by a simple mechanism and a method and a device for polishing a die for the micro lens. Ž<P>SOLUTION: In this small tilting polishing method, with a workpiece held by a workpiece holding means, a tool is disposed on the surface of the workpiece to be polished, and the workpiece is polished. While swinging the tool and rotating the workpiece about a rotating axis, the workpiece is tilted about a tilt axis together with the workpiece holding means. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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