| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of fabricating an optical functional element, which can achieve a uniform and accurate periodical polarization inversion structure in a high yield by preventing excessive progress of polarization inversion in a longitudinal end portion of a comb-teeth electrode. <P>SOLUTION: A comb-teeth electrode 105 having a plurality of electrodes extended in one direction aligned in parallel at a prescribed period in a comb-teeth manner, a frame electrode 106 formed to cover the circumference of the comb-teeth electrode 105, and an inter-electrode wire 107 connecting the comb-teeth electrode 105 to the frame electrode 106 are formed on a first major surface of a substrate made of a ferroelectric material. A back-face electrode 104 is entirely formed on a second major surface of the substrate 101 facing the first major surface. A periodical polarization inversion structure is formed by applying a voltage between the frame electrode 106 on the first major surface and the back-face electrode 104 on the second major surface. A region equivalent to the periodical polarization inversion structure is cut from the substrate thereby fabricating an optical functional element. The inter-electrode wire 107 is formed on the substrate 101 through an insulating layer 102. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
