| 摘要 |
<P>PROBLEM TO BE SOLVED: To reconcile the sensitivity with strength of an MEMS (Micro Electro Mechanical Systems) having a flexible section and spindle section at a high level. Ž<P>SOLUTION: This MEMS includes the flexible section, a bulk section that is made of bulk material and includes a thin part constituting at least a part of the flexible section and a projecting section projecting from the thin part in the thickness direction of the thin part, a spindle section that joins to a side surface of the projecting section, moves with the flexible section, and is made of metal material, and a detecting means for detecting the deformation or displacement of the flexible section. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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