| 摘要 |
PROBLEM TO BE SOLVED: To provide a purification method which is excellent in effect of separating impurities such as boron, does not cause the problem of contamination with an impurity removing agent, and is excellent in purification effect. SOLUTION: The method for purifying trichlorosilane is characterized in that, in a step of purifying trichlorosilane produced by reacting metallic silicon with hydrochloric acid gas, a mixed fluid containing the trichlorosilane is introduced into a distillation apparatus and brought into contact with a chlorosilane-based polymer, the trichlorosilane is purified by distillation, and low-boiling impurities contained in the mixed fluid are incorporated into the polymer, separated as distillation residues from the trichlorosilane, and removed together with the polymer from the system. COPYRIGHT: (C)2010,JPO&INPIT
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