METHOD AND APPARATUS FOR PERFORMING CALIBRATION-BASED ABSOLUTE SHAPE MEASUREMENT USING PHASE-SHIFTING PROJECTED FRINGE PROFILOMETRY

摘要

A method and apparatus for performing absolute shape measurement using phase-shifting projected fringe profilometry. Techniques are disclosed to permit calibration of the optical system's distortion characteristics in both phase and lateral directions. Such a calibration utilizes specialized examination surfaces, methods to examine those surfaces and algorithms to process the acquired data, all of which are provided by the present invention. A novel calibration tool incorporating improved examination surfaces is also disclosed.