A VIBRATION SENSOR AND A SYSTEM TO ISOLATE VIBRATIONS

摘要

A vibration sensor (9) comprises a reference mass (10), a resilient element (11) supporting the reference mass (10), and a base (13) supporting the resilient element (11), and further comprises a displacement sensor (12) for determining the distance between the reference mass (10) and the base (13). In accordance with the invention the vibration sensor comprises an actuator (14) that is situated between the resilient element (11) and the base (13), a second displacement sensor (15), and a controller (16) for providing an output signal to the actuator (14)