APPARATUS AND METHOD FOR FABRICATING ORGANIC LIGHT EMITTING DIODE DISPLAY DEVICE

摘要

PURPOSE: An apparatus and a method for manufacturing an organic electroluminescent display device are provided to prevent a gap between a mask and a substrate in a film deposition process by using a substrate-mask sticking unit. CONSTITUTION: A mask(120) is arranged inside a chamber(110). The mask has an opening(125) of a fixed pattern. A deposition material supply source(130) is arranged under the mask. The deposition material supply source supplies a deposition material to a mask side through the opening of the mask. A substrate-mask sticking unit(170a) includes a flexible plate and a transfer device. The flexible plate pressurizes a top surface of the substrate into the mask side. The flexible plate is transformed according to deflection of the substrate. The transfer device transfers the flexible plate into the top surface of the substrate.