| 摘要 |
A method of manufacturing a thin-film magnetic head is capable of planarizing and forming the upper surface of a main magnetic pole with high precision, of forming a trailing gap with a precise form, and of efficiently and precisely forming side shields and a trailing shield. A stopper layer is formed so as to cover a magnetic pole and so that a thickness thereof at positions on both sides of the magnetic pole is a predetermined side shield gap width. After a resist layer has been formed so that a thickness thereof at positions on both sides of the magnetic pole is a predetermined side shield width, an insulating layer is formed thereupon and then lapping according to a CMP process is carried out until the stopper layer becomes exposed. After this, the stopper layer is removed by dry etching until the upper surface of the magnetic pole becomes exposed, and then the upper surface of the magnetic pole is lapped by a CMP process until the surface is planarized. Next, the resist layer is removed and the stopper layer that becomes exposed due to such removal is also removed to form the trailing shield and the side shields.
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