MICROELECTROMECHANICAL SYSTEM MICROPHONE

摘要

A microelectromechanical system microphone is provided. The microelectromechanical system microphone includes a first electrode, a second electrode and a first dielectric layer. The first electrode is disposed on a substrate and has a first flexible portion. The second electrode is disposed between the first electrode. A material of the second electrode includes polysilicon or polycide. The first dielectric layer is at least partially disposed between the first and second electrodes so as to suspend the first flexible portion.