| 摘要 |
PROBLEM TO BE SOLVED: To reduce dispersion of a differential pressure detection value caused by a temperature change, and to thereby improve inspection accuracy, by suppressing heat exchange between a leak inspection device and an inspection object, and by reducing a temperature change during inspection of the device and the inspection object, concerning the leak inspection device of an air differential pressure type. SOLUTION: In this leak inspection device 5 for applying an air pressure to the inspection object 17 wherein an opening part is blocked by sealing tools 16, 16 and to a reference tank 18, and determining existence of an air leak from inside the inspection object 17 corresponding to a differential pressure value generated between the air pressure in the inspection object 17 and the air pressure in the reference tank 18, a heat insulating layer 30 is provided between the inspection object 17 and the sealing tools 16, 16, and the inspection object 17 is thermally insulated with the sealing tools 16, 16. COPYRIGHT: (C)2008,JPO&INPIT
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