THIN FILM SOLAR BATTERY MODULE MANUFACTURING METHOD AND THIN FILM SOLAR BATTERY MODULE

摘要

Provided are a thin film solar battery module manufacturing method, by which highly reliable withstand voltage characteristics can be ensured, and a thin film solar battery module.  In the thin film solar battery module manufacturing method, a first electrode layer (11) is formed on an insulating transparent substrate (10), first isolating trenches (21X, 21Y), which isolate peripheral regions (30X, 30Y) of the transparent substrate (10) and a power generating region (50) inside the peripheral regions from each other, are formed with a depth reaching the surface of the transparent substrate (10), and a semiconductor layer (13) is formed on the transparent substrate (10).  Then, in the method, a second electrode layer (12) is formed on the transparent substrate (10), second isolating trenches (22a, 22X, 22Y) are formed at positions closer to the peripheral regions (30X, 30Y) than the first isolating trenches (21X, 22Y) with a depth reaching the surface of the transparent substrate (10), and the first electrode layer (11), a semiconductor layer (13) and the second electrode layer (12) on the peripheral regions (30X, 30Y) are removed by performing blast process to the peripheral regions (30X, 30Y).