| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an accurate positioning device for performing assembly or the like while stably positioning even precise and micro-fine components. <P>SOLUTION: This accurate positioning device is provided with: a voice coil motor 5 for supporting a coil placed in a magnetic field so as to be displaced to a prescribed direction by an elastic guidance member, and for driving an actuator including the coil by supplying currents to the coil, and for positioning components by displacing the actuator; a displacement sensor 18 for detecting the displacement of the actuator; and a controller 6 for calculating a speed and acceleration from the displacement detected by the displacement sensor, and for calculating the driving force of the actuator from the position, speed and acceleration of the actuator and an arbitrarily set external force, and for outputting coil supply currents corresponding to the driving force. <P>COPYRIGHT: (C)2010,JPO&INPIT |
