| 摘要 |
<P>PROBLEM TO BE SOLVED: To disclose a fluid handling structure where the size and structure of a fluid extraction opening are designated to reduce vibration transmitted to the fluid handling structure as a result of two-phase extraction. <P>SOLUTION: The area of respective fluid extraction openings, the total area of all of the fluid extraction openings, and/or the space between adjacent fluid extraction openings can be controlled. When vibration decreases, precision in exposure is improved. <P>COPYRIGHT: (C)2010,JPO&INPIT |
