| 摘要 |
A position detection sensor is provided and includes: a scale including a self-emitting part that emits light to form a pattern on the scale; and a relative movable part provided in such a manner to be opposed to the scale and to be movable relative to the scale, the relative movable part including a light receiving part that detects the light emitted at a position in a portion of the scale where the pattern is formed, the position corresponding to a current position of an object to be measured. At least one of a traveling amount, traveling speed and absolute position of the object is detected based on a detection signal outputted from the light receiving part.
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