| 摘要 |
A fine positioner module is used to perform fine positioning of a device that is pressing against a work surface. In some embodiments, the fine positioner module includes a contact member for making contact with a work surface, a position adjustor for using the contact member to move the device along the work surface, and an actuator for relieving pressure of the device against the work surface while the contact member is used to move the device along the work surface.
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