PROTECTIVE LAYER TO ENABLE DAMAGE FREE GAP FILL

摘要

PURPOSE: A protective layer to enable damage free gap fill is provided to perform fill so that a void or a weak area is not left unfilled without damage to a specific part. CONSTITUTION: A protective layer to enable damage free gap fill is comprised of the steps: proving some specific part with higher density than others and some specific part with lower density than others on a substrate(301); depositing a protective layer on a specific part(303); depositing a dielectric layer to partially fill a gap of a high aspect ratio(305); and etching a substrate to remove a deposition material from to decrease aspect ratio of the gap at the specific part with a high density.