发明名称 OPTICAL ELEMENT HOLDING MEMBER AND OPTICAL ELEMENT HOLDING APPARATUS, OPTICAL EQUIPMENT, AND EXPOSURE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To solve the problem, wherein in the conventional optical element holding member which supports an optical element, by a holding member through an elastic part deformable in a radial direction, rigidity in the radial direction is significantly lowered and the position of the optical element is not kept stable, consequently, optical performance deteriorates, even if influence due to volume change of the holding member can be reduced. <P>SOLUTION: The optical element holding member is constituted of a ring-like member, and the ring-like member is provided with a notch or a notch and a slit so as not to continue on an optional periphery of concentric circles, with the center shaft of the ring-like member as a center. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009271187(A) 申请公布日期 2009.11.19
申请号 JP20080119735 申请日期 2008.05.01
申请人 CANON INC 发明人 OKAMOTO TOMOHIRO
分类号 G02B7/02;H01L21/027 主分类号 G02B7/02
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