NON-CONTACT TRANSFER DEVICE AND BERNOULLI CHUCK

摘要

PROBLEM TO BE SOLVED: To fully raise the holding efficiency of a holding hand 5 by preventing generation of a positive pressure as repulsion near the circumferential edge of the nozzle aperture 15 of a Bernoulli chuck 13. SOLUTION: A hand body 7 is provided with a plurality of Bernoulli chucks 13 each having a nozzle aperture 15 opening on the distal end side and capable of spouting out air, and an introduction hole 17 capable of introducing air along the inner wall surface of the nozzle aperture 15 and coupled with an air supply source 19 for supplying air wherein the circumferential edge of the nozzle aperture 15 of each Bernoulli chuck 13 has an acute shape. COPYRIGHT: (C)2010,JPO&INPIT