| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus and inspection method for preventing occurrence of displacement of a probe needle from a connection terminal of an inspecting object. Ž<P>SOLUTION: This inspection apparatus 10 has: a plurality of probe blocks 13 having probe groups 12 each of which is formed of a plurality of probe needles 121; a probe base 14 to which the plurality of probe blocks 13 are connected commonly, reference positions 15a and 15b; and a heating/cooling device 17 for varying the temperature of the probe base 14. Reference positions of the inspecting object and the probe base 14 are set by the reference positions 15a and 15b so that the plurality of probe needles 121 of each probe block 13 are connected to the corresponding connection terminal 201 of the inspecting object. The heating/cooling device 17 varies the temperature of the probe base 14 so that it follows the variation amount of the shape by temperature variation of the inspecting object when the temperature of the inspecting object varies. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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