发明名称 |
METHOD FOR MANUFACTURING MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDING MEDIUM, AND MAGNETIC RECORDING AND REPRODUCING DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To improve smoothness of the surface of a recording layer and to improve precision in nano imprint of a resist layer by eliminating occurrence of residuals in the removal of a mask layer after the patterning process of a magnetic layer. Ž<P>SOLUTION: A method for manufacturing a magnetic recording medium having at least the recording layer 4 on a nonmagnetic substrate includes: a step of forming the recording layer 4 on the nonmagnetic substrate 1; a process of forming a mask layer 5 containing Si on the recording layer 4; a process of oxidizing the surface of the mask layer 5; a process of forming the resist layer 7 on the oxidized surface of the mask layer 5, a process of forming a convexo concave pattern on the mask layer 5 by patterning the resist layer 7; a process of magnetically separating the recording layer 4 using the convexo concave pattern on the mask layer 5; and a process of removing the mask layer 5. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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申请公布号 |
JP2009271967(A) |
申请公布日期 |
2009.11.19 |
申请号 |
JP20080119538 |
申请日期 |
2008.05.01 |
申请人 |
SHOWA DENKO KK |
发明人 |
FUKUSHIMA MASATO |
分类号 |
G11B5/855;G03F7/20;G11B5/65 |
主分类号 |
G11B5/855 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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