| 摘要 |
A test pattern with a poly fuse is provided to reduce a time interval necessary for a defect analysis by including a poly fuse between pads connected to a node with the same potential difference. A test device(10) for electrostatic protection is formed to analyze an electrical characteristic. A plurality of test pads(20) are formed in the periphery of the test device, separated from the test device. The test device is connected to the test pad by a metal interconnection(30). The test pad is connected to another test pad by a fuse(40). |
