摘要 |
The present invention is characterized in that a bio-sensor constituting a biochip has a metal electrode with a surface on which a bio-friendly dielectric thin film is formed. The bio-friendly dielectric thin film serves to prevent non-specific adsorption between a protein-like enzyme and a metal electrode. Therefore, the present invention prevents deterioration of the reaction of physiologically active materials caused by the non-specific adsorption from inside of the biochip to the surface of the metal electrode. Further, a dielectric thin film having a large dielectric constant serving as a bio-friendly dielectric thin film is formed on the surface of the metal electrode, improving the sensitivity in electrical detection according to the reaction of physiologically active materials. |