METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE, AND OPTICAL WAVEGUIDE

摘要

An optical waveguide manufacturing method has a step of forming a lower clad layer by hardening a clad layer forming resin formed on a base material; a step of forming a core layer by laminating, on the lower clad layer, a resin film for forming the core layer; a step of forming a core pattern by exposing and developing the core layer; and a step of forming an upper clad layer by laminating, on the core pattern, a resin film for forming an upper clad layer, and hardening the clad layer forming resin.  At the time of laminating the resin film for forming the upper clad layer, laminating conditions are controlled so that the melt viscosity of the clad layer forming resin is 100-200Pa·s.  The optical waveguide is formed of a resin having a melt viscosity of 100-200Pa·s.  In the optical waveguide manufacturing method, the optical waveguide can be manufactured with high productivity, and no bubble is left between the core layer and the upper clad layer.