| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal flow meter capable of accurately detecting a flow rate even when a fluid temperature varies rapidly or when the fluid temperature is high. <P>SOLUTION: A probe PR includes: a first main heating resistor MH1; a second main heating resistor MH2 set at a temperature different from that of the first main heating resistor MH1; and a sub-heating resistor SH for heating supporting bodies of the two main heating resistors MH1, MH2. A CPU of a sensor control circuit SCU finds a fluid temperature by using the two main heating resistors, and finds a fluid flow rate by using at least one of the two main heating resistors. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
