MEMBRANE MANUFACTURING DEVICE, SOLAR CELL MANUFACTURING DEVICE, MEMBRANE MANUFACTURING METHOD AND SOLAR CELL MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a membrane manufacturing device capable of preventing each of layers of a membrane laminate from being contaminated by material of the other layers.

SOLUTION: A membrane manufacturing device includes: a capacitive coupling plasma film forming chamber 11 for generating plasma according to a capacitive coupling system; an inductive coupling plasma film forming chamber 12 for generating plasma according to an inductive coupling system; a substrate feeding chamber 15 internally including a substrate feeding means 152 for feeding a substrate S between the capacitive coupling plasma film forming chamber 11 and the inductive coupling plasma film forming means 12; and a feeding pressure switching means (pressure adjustment gas supply port 144 and exhaustion device 155) for switching pressure inside the substrate feeding chamber 15, wherein pressure inside the substrate feeding chamber 15 is set to a value close to pressure in capacitive coupling plasma generation when feeding in or feeding out the substrate between the capacitive coupling plasma film forming chamber 11 and the substrate feeding chamber 15, and is set to a value close to pressure in inductive coupling plasma generation when feeding in or feeding out the substrate between the inductive coupling plasma film forming chamber 12 and the substrate feeding chamber 15.

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